820G 系列----**压力变送器/传感器
特性...
- 标准托、千帕和毫帕真空范围
- 宽补偿工作温度
- 误接线保护
概况/设计原理:
820G系列传感器具有**度高、低成本、**式传感器，满足真空应用*苛刻的要求。全焊接结构避免了其他设计中不同金属部件之间的摩擦而引起的稳定性问题。820G系列压力计可提供不同真空压力的类型，而可靠的设计保证产品在更广温度范围内的承压能力.
工作原理:
820G系列压力计具有一个Inconel ®隔膜和一个绝缘的电极，构成了一个可变电容。当压力(真空)升高或降低时，电容随之变化。该电容经检测后转换为符合要求的线性电压输出信号.
典型应用:
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半导体制造
-
吸收冷却器
-
激光
-
高压**器
-
冷却干燥
-
真空蒸馏
| Specifications | ||
| Input | ||
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Pressure Range |
0 to 1000 Torr or 0 to 100 kPa |
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Proof Pressure |
See ordering chart |
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Burst Pressure |
See ordering chart |
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Fatigue Life |
>1 million cycles |
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| Performance | ||
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Output |
0-5 Vdc or 0-10 Vdc @6mA (3 wire) |
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Supply Voltage (Vs) |
9-30 Vdc (14-30 Vdc for 10 Vdc output) |
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Long Term Drift |
±0.5% FS/year |
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Accuracy |
±0.5% RDG |
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Thermal Error Zero |
±0.01% FS/°F (±0.018% FS/°C) |
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Thermal Error Span |
±0.015% RDG/°F (±0.027% RDG/°C) |
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Compensated Temperature |
32°F to +122°F (0°C to +50°C) |
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Operating Temperatures |
-4°F to +176°F (-20°C to +80°C) |
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Storage Temperatures |
-4°F to +185°F (-20°C to +85°C) |
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Zero Tolerance |
.5% FS |
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Span Tolerance |
.5% FS |
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Minimum Load Resistance |
5000 ohms |
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Response Time |
20 ms |
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| Mechanical Configuration | ||
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Pressure Port |
See ordering chart |
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Wetted Parts |
Inconel® with Stainless Steel (4 T fitting- All Inconel) |
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Electrical Connection |
9-Pin D-Sub |
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Enclosure |
All Welded Stainless Steel |
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Shock |
50g |
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Approvals |
CE - 89/336/EEC for Heavy Industrial |
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Weight |
5 oz |
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